Roll to Roll Substrates 400mm – 2000mm wide

基片宽幅：400mm -2000mm

30” – 90” Temperature Controlled Drum Architecture

30英寸-90英寸温控镀膜鼓

1-12 front side deposition sources – 0-4 Back Side sources

前面1-12个沉积源 —  0-4个背面沉积源

Coating Method

Options

镀膜方式选项

Rotatable or Planar Magnetron Sputter Cathodes

旋转或平面溅射阴极

Standard Power Options– RF, Pulsed DC, DC, AC and HIPIMS

电源：射频，脉冲直流，直流，中频和高功率脉冲磁控溅射

PECVD, Ion Source  离子源或PECVD

Thermal evaporation, e-beam  etc.

热阻蒸发，电子束蒸发

System Dimensions

典型尺寸

Width宽 6m x Depth 深 10.2m x Height 高– 8.2m

Typical Applications

典型应用

Thin Film Solar / Battery or Flexible Electronics

薄膜太阳能/电池或柔性电子元件

Touch Screen film on glass  柔性玻璃镀膜

AR/Low E - Window Films窗膜