
Small Batch Fast Cycle Sputter Deposition立式快速磁控溅射设备
MVS Plascoat is significantly thinner and performs three times better in corrosion testing than our competitors.
野马Plascoat 保护涂层技术在腐蚀性测试中的性能优于竞争对手的3倍
Mustang’s
Plascoat is an HMDSO mid frequency plasma cured monomer top coat. 野马
Plascoat 技术是采用中频等离子离化HMDSO(六甲基二硅氧烷)制备的单体顶层 |
Electrode design minimizes
arcing and simplifies maintenance 电极杆的设计可实现最小化灭弧和最简单的维护 |
Highly uniform
coatings on complex three dimension and high aspect ratio substrates. 在复杂的3维和高深宽比产品上获得极高均匀性涂层 |
Used to protect the PVD layer
from UV, moisture, and oxidation. 用于保护PVD 层隔离UV,水气和防止氧化 |
MVS’s reflector
coatings exceeds all forward lighting specifications. 野马反射镜涂层技术满足所有前大灯规格要求 |
MVS Standard Reflective Coating
Processes 标准反射涂层工艺
88 – 91% - Standard Al reflector with Plascoat protective coating
88 – 91%标准的铝反射镜包含Plascoat保护涂层
Colt 4828 System – Typical Configuration for Lighting 车灯镀膜典型配置:
Dual door – Stainless Steel Vertical chamber with viewport and single planetary turn table in each door. 双门,不锈钢腔室,每一个门含一个单轴工件架 |
(2) Mustang Vacuum High Power
Planar Magnetron Cathodes ,up to 90kw DC power per cathode 2个野马高功率磁控溅射阴极,每一个阴极最高90KW |
Oerlikon SV630
mechanical pump & Oerlikon WH4400 blower 莱宝SV630 机械泵和WH4400 罗茨泵组 |
Varian 20inch high vacuum diffusion pump with cryocoil Polycold cryogenic cooler for water vapor pumping 瓦里安20英寸扩撒泵 + Polycold水汽捕集泵 |
One 10K Medium Frequency 40 KHz Power Supply and one load matching network with two 1” glow bars 1个10KW 的中频电源和匹配的2个直径1英寸的电极棒 |
Standard Automotive Reflector Cycle
标准车灯反射膜镀膜周期 |
3.5 – 5 Minutes substrate dependent 3.5-5分钟根据基底不同 |
Optimized
Coating Area 有效涂层空间 |
1,219mm
高x 711mm 直径 Single
or multiple planetary tooling configurations单轴或多轴工件架配置 |
MVS High Power Cathode 高功率溅射阴极 |
1,371mm
x 152mm target 靶材尺寸 Typically
2 cathodes 典型的2个溅射阴极 Upgrade
to 4 cathodes 可升级为4个溅射阴极 |
Mid
Frequency AC Top Coat |
中频交流Top
Coat |
Cryogenic water pumping |
低温水汽捕集泵 |
Automation
Options Available 可选项 |
腔室门自动进样 |
System Dimensions 设备尺寸 |
Width 宽
3.71 meters (12’ 2”) 米 Depth 深 5.18
meters (17’) 米 Height 高 2.79 meters (9’ 2”) 米 |