ENGLISH 中文
Colt48 磁控溅射镀膜机

 

Small Batch Fast Cycle Sputter Deposition立式快速磁控溅射设备


MVS Plascoat™ is significantly thinner and performs three times better in corrosion testing than our competitors.

野马Plascoat保护涂层技术在腐蚀性测试中的性能优于竞争对手的3


Mustang’s Plascoat ™ is an HMDSO mid frequency plasma cured monomer top coat.

野马 Plascoat ™ 技术是采用中频等离子离化HMDSO(六甲基二硅氧烷)制备的单体顶层

Electrode design minimizes arcing and simplifies maintenance 

电极杆的设计可实现最小化灭弧和最简单的维护

Highly uniform coatings on complex three dimension and high aspect ratio substrates. 

在复杂的3维和高深宽比产品上获得极高均匀性涂层

Used to protect the PVD layer from UV, moisture, and oxidation. 

用于保护PVD 层隔离UV,水气和防止氧化

MVS’s reflector coatings exceeds all forward lighting specifications.

野马反射镜涂层技术满足所有前大灯规格要求



MVS Standard Reflective Coating Processes  野马标准反射涂层工艺

88 – 91% - Standard Al reflector with Plascoat™ protective coating    

88 – 91%标准的铝反射镜包含Plascoat™ 保护涂层



Colt 4828 SystemTypical Configuration for Lighting  车灯镀膜典型配置:

Dual door – Stainless Steel Vertical chamber with viewport and single planetary turn table in each door.  

双门,不锈钢腔室,每一个门含一个单轴工件架

(2) Mustang Vacuum High Power Planar Magnetron Cathodes ,up to 90kw DC power per cathode

2 野马专利的磁控溅射阴极,每一个阴极最高90KW

Oerlikon SV630 mechanical pump & Oerlikon WH4400 blower

莱宝SV630 机械泵和WH4400 罗茨泵组

Varian 20inch high vacuum diffusion pump with cryocoil Polycold cryogenic cooler for water vapor pumping 

瓦里安20英寸扩撒泵 + Polycold水汽捕集泵

One 10K Medium Frequency 40 KHz Power Supply and one load matching network with two 1” glow bars 

110KW 的中频电源和匹配的2个直径1英寸的电极棒


Standard Automotive Reflector Cycle 

 标准车灯反射膜镀膜周期

3.5 – 5 Minutes substrate dependent

3.5-5分钟根据基底不同

Optimized Coating Area

有效涂层空间

1,219mm x 711mm 直径

Single or multiple planetary tooling configurations单轴或多轴工件架配置

MVS High Power Cathode 野马高功率溅射阴极

 

1,371mm x 152mm target  靶材尺寸

Typically 2 cathodes 典型的2个溅射阴极

Upgrade to 4 cathodes 可升级为4个溅射阴极

Mid Frequency AC Top Coat

中频交流Top Coat

Cryogenic water pumping

低温水汽捕集泵

Automation Options Available

可选项

腔室门自动进样

System Dimensions

设备尺寸

 

Width   3.71 meters (12’ 2”)

Depth   5.18 meters (17’)

Height 2.79 meters (9’ 2”)