
Small Batch Fast Cycle Sputter Deposition立式快速磁控溅射设备
MVS Plascoat is significantly thinner and performs three times better in corrosion testing than our competitors.
野马Plascoat 保护涂层技术在腐蚀性测试中的性能优于竞争对手的3倍
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Mustang’s
Plascoat is an HMDSO mid frequency plasma cured monomer top coat. 野马
Plascoat 技术是采用中频等离子离化HMDSO(六甲基二硅氧烷)制备的单体顶层 |
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Electrode design minimizes
arcing and simplifies maintenance 电极杆的设计可实现最小化灭弧和最简单的维护 |
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Highly uniform
coatings on complex three dimension and high aspect ratio substrates. 在复杂的3维和高深宽比产品上获得极高均匀性涂层 |
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Used to protect the PVD layer
from UV, moisture, and oxidation. 用于保护PVD 层隔离UV,水气和防止氧化 |
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MVS’s reflector
coatings exceeds all forward lighting specifications. 野马反射镜涂层技术满足所有前大灯规格要求 |
MVS Standard Reflective Coating
Processes 标准反射涂层工艺
88 – 91% - Standard Al reflector with Plascoat protective coating
88 – 91%标准的铝反射镜包含Plascoat保护涂层
Colt 4828 System – Typical Configuration for Lighting 车灯镀膜典型配置:
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Dual door – Stainless Steel Vertical chamber with viewport and single planetary turn table in each door. 双门,不锈钢腔室,每一个门含一个单轴工件架 |
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(2) Mustang Vacuum High Power
Planar Magnetron Cathodes ,up to 90kw DC power per cathode 2个野马高功率磁控溅射阴极,每一个阴极最高90KW |
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Oerlikon SV630
mechanical pump & Oerlikon WH4400 blower 莱宝SV630 机械泵和WH4400 罗茨泵组 |
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Varian 20inch high vacuum diffusion pump with cryocoil Polycold cryogenic cooler for water vapor pumping 瓦里安20英寸扩撒泵 + Polycold水汽捕集泵 |
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One 10K Medium Frequency 40 KHz Power Supply and one load matching network with two 1” glow bars 1个10KW 的中频电源和匹配的2个直径1英寸的电极棒 |
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Standard Automotive Reflector Cycle
标准车灯反射膜镀膜周期 |
3.5 – 5 Minutes substrate dependent 3.5-5分钟根据基底不同 |
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Optimized
Coating Area 有效涂层空间 |
1,219mm
高x 711mm 直径 Single
or multiple planetary tooling configurations单轴或多轴工件架配置 |
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MVS High Power Cathode 高功率溅射阴极 |
1,371mm
x 152mm target 靶材尺寸 Typically
2 cathodes 典型的2个溅射阴极 Upgrade
to 4 cathodes 可升级为4个溅射阴极 |
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Mid
Frequency AC Top Coat |
中频交流Top
Coat |
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Cryogenic water pumping |
低温水汽捕集泵 |
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Automation
Options Available 可选项 |
腔室门自动进样 |
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System Dimensions 设备尺寸 |
Width 宽
3.71 meters (12’ 2”) 米 Depth 深 5.18
meters (17’) 米 Height 高 2.79 meters (9’ 2”) 米 |







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